Scanning spreading resistance microscopy
SSRM provides high-resolution quantitative carrier distributions in 1D, 2D & 3D semiconductor structures. As inventor of this electrical AFM-based technique, imec offers this technique as a service.
Imec can help you with a wide variety of sample preparation methods, ranging from simple wafer dicing to advanced ion beam preparation.
Materials and components analysis
Besides SSRM, the materials and components analysis group houses a wide variety of material characterization techniques. Upon specific request and depending availability, these are also made available to external customers.
Partnership and training
Imec offers extensive tailor made training to introduce SSRM into your lab and can be your partner for applying AFM-based metrology to new devices and materials, and implementing novel characterization concepts. As material characterization experts we can also be your partner for developing or implementing new material analysis techniques and modes.
Full diamond probes
Imec's diamond AFM tips are made from solid boron-doped polycrystalline diamond. These tips are the enabler for high-resolution electrical AFM measurements requiring high forces, such as Scanning Spreading Resistance Microscopy (SSRM).
Calibration standards and test samples
Imec's calibration standards are suited for the calibration of quantitative electrical measurements. We also offer a range of test samples allowing to evaluate the performance of your tools.
For more information regarding advanced metrology solutions, Kristof Paredis will be happy to help you.