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With our CORE wafer service, imec gives you access to wafers based on the latest N+1 and N+2 technology nodes that are available from our module development activities.Typical examples are FEOL FinFet STI wafers, BEOL dual damascene wafers, calibration wafers, TSV wafers and high aspect-ratio test vehicles.These wafers allow you to validate equipment and materials and to develop advanced process technology (etch, deposition, clean, CMP, metrology and lithography).

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