/Optimization of the maintenance plan for Dry etch tools in a semiconductor R&D Fab

Optimization of the maintenance plan for Dry etch tools in a semiconductor R&D Fab

Leuven | More than two weeks ago

The sophisticated equipment in imec's cleanroom needs high-quality maintenance. Decent maintenance planning is key to reach this goal.

Thesis content:

 

1) Review, optimize and document the maintenance checklist for a specified Dry etch tool together with the responsible engineers with focus on:

 • Pre-task planning

 • Spare parts/consumables preparation

 • Clear criteria to maintain parts to improve quality and repeatability

 • Profound documentation to increase repeatability from engineer to engineer

 • After care

2) Participate in the current day to day maintenance activities together with the leading cluster engineer to build up practical experience

3) Independently perform the basis HW checks on weekly basis

4) Update and improve checklists based on the learnings

5) Generate new PM checklists for CM activities that occur during the stage to standardize the way of working for future re occurrences

...

Type of project: Combination of internship and thesis

Required language: Dutch, English

Required background: Electromechanics

Manager: For more information or for application, please contact Joris Pancken (Joris.Pancken@imec.be)

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