Postdoc Understanding the physical chemistry of EUV photoresist

Leuven - PostDoc
More than two weeks ago

Understanding the Physical Chemistry of EUV Photoresist Using Time-resolved: IR and Electron spectroscopy, Interference Lithographic Imaging and Reflectometry
"Then a miracle occurs" and the resist is imaged, nonsense of course, there are no miracles, just lack of visibility. We intend to remedy this by enabling the ability to study the fast ionization processes that lead to low energy electron chemistry of photoresists that occurs after absorption of 13.5 nm light, and, to do so, in combination with the ability to do near molecular scale lithography using high numerical aperture EUV and interference exposure systems.


Postdoc Understanding the physical chemistry of EUV photoresist

What you will do

The semiconductor industry hinges on the ability to image the nanoscale devices that form an integrated circuit. Today, we plan to use 13.5 nanometer light to form features that will be smaller than 5nm in imageable polymeric masking materials, termed photoresists. In this process patterns are imaged with cameras called scanners, costing in excess of 100 million USD, into the resist that after subsequent processing forms 3D images, which then protects areas of the underlying substrate allowing selective removal by plasma etch or material manipulation by ion implant. Measurement (metrology) is equally of importance as if you cannot see what you are building you cannot control it.

Recently, imec announced the formation of the AttoLab that allows the real-time analysis of materials exposed to extreme-ultraviolet-light (EUV) from the attosecond to 200 picosecond using IR and electron spectroscopic techniques, lensless reflectometry, and EUV interference imaging to features as small as 4 nanometers lines and spaces. (AttoLab announcement:

This position is twofold:

  • Firstly, the successful individual will be pivotal in supporting the installation of the new “AttoLab” at imec. This AttoLab initiative concerns the installation of a dual HHG beam line to a) support interference lithography and b) the analytics (tr-IR, tr-CDI, tr-ARPES, ...) required to understand EUV driven photoresist chemistry, to mapping the band structure of exotic materials ranging from Graphene, Transition Metal Dichalcogenides, Topological Insulators, etc. The time resolved capabilities, which area expected to span the attosecond to picosecond time frame, will be pivotal in this respect.
  • The second aspect of this multi-year program concerns the development of imaging capabilities based around the CDI/reflectometry concept, with the long-term goal of understanding true resolution limits, and how such capabilities can be brought into inline metrology programs. The open-ended nature of the program thus highlights the fact that there is a lot of science to be uncovered in this rapidly evolving field.

What we do for you

We offer you the opportunity to join one of the world’s premier research centers in nanotechnology at its headquarters in Leuven, Belgium. With your talent, passion and expertise, you’ll become part of a team that makes the impossible possible. Together, we shape the technology that will determine the society of tomorrow.
We are proud of our open, multicultural, and informal working environment with ample possibilities to take initiative and show responsibility. We commit to supporting and guiding you in this process; not only with words but also with tangible actions. Through, 'our corporate university', we actively invest in your development to further your technical and personal growth.
We are aware that your valuable contribution makes imec a top player in its field. Your energy and commitment are therefore appreciated by means of a competitive salary.

Who you are

  • You have a PhD in Chemical Physics, Material Science, Physical Chemistry or Physics.
  • We value your background to work as physical photo-chemists using state-of-the-art high harmonic generated coherent EUV sources for imaging and studying molecular dynamics.
  • We appreciate your familiarity with time-domain computational chemistry of excited state molecules to aid in interpretation and design of experiments.
  • You work in a structured, transparent and accurate way
  •  You are a constructive team player and actively share experience and knowledge with colleagues.
  • Your networking skills, creativity, persistence and passion for what you do are highly valued.
  • We are looking for your excellent communication skills in English, as you will work in a multicultural team.

This postdoctoral position is funded by imec through KU Leuven. Because of the specific financing statute which targets international mobility for postdocs, only candidates who did not stay or work/study in Belgium for more than 24 months in the past 3 years can be considered for the position (short stays such as holiday, participation in conferences, etc. are not taken into account).


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