Scanning tip array chips for nano-tomography applications

Tomography approaches like magnetic resonance imaging (MRI) have revolutionized our medical diagnosis and treatment possibilities and are today widely used in hospitals around the ‘macroscopic’ world. In the ‘nanoscopic’ world, more specifically in nanoelectronics chip analysis, tomography approaches are being developed as well to reliably probe an ensemble of several physical properties in a nanometer-scale confined three-dimensional (3D) volume. Therefore, imec has demonstrated a novel 3D approach based on scanning probe microscopy (SPM) whereby nanometer-thick slices of materials are locally removed by a first tip and the actual measurement action is performed with a second tip. By alternating between these tips, a series of 2D images is collected which can be converted into a nano-tomogram. The crucial component of this approach are tip array chips.

This internship topic explores the design, fabrication and evaluation of advanced tip array chips with multi-sensing and switching capabilities. The student will work in a cleanroom facility whereby using standard microfabrication techniques such as lithography, wet/dry etching, and deposition. Furthermore, he/she will work with imec’s advanced SPM tools. The student will collaborate closely with our SPM and probe experts. A can-do mentality, a high degree of independent working and the ability to efficiently collaborate within a team are crucial.