SIS on ultra-thin PMMA for high-k deposition on 2D materials and selective high-k plasma etch and soft-landing onto 2D materials

Leuven - Master projects
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About a week ago

The main objective of the internship is to study the synthesis of 3-4nm high-k dielectric (corresponding to 1 nm EOT) using a sacrificial template, based on porous polymer (polymethylmetacrylate/PMMA or polyphtalaldehyde/PPA) combined with sequential infiltration synthesis (SIS). The removal of high-k dielectric by plasma technique will also be studied.

The proposed work-package aims at high-k processing for 2D materials applications. The main objective of the internship is to study the synthesis of 3-4nm high-k dielectric (corresponding to 1 nm EOT) using a sacrificial template, based on porous polymer (polymethylmetacrylate/PMMA or polyphtalaldehyde/PPA) combined with sequential infiltration synthesis (SIS). The principle will use the following sequence: first, spin-coat 3-5 nm of polymer; second, infiltrate the polymer with a specific Al(CH3)3/H2O ALD sequence forming Al2O3 within the bulk of the polymer; third, perform some post-treatments in order to remove the residual carbon from the formed composite film. Post-treatments will be based on annealing, UV-cure, and/or downstream plasma processing. A second objective is to support some technological etch process aiming at etching high-k (10nm ZrO2) stopping on a sub-nm SiO2 on top of WS2, using a BCl3/O2 cyclic process in a state-of-the art 300mm plasma etch chamber. The goal of the process is to remove the whole dielectric stack (ZrO2 + SiO2) with minimal damage to the WS2. Screening of plasma chemistries (BCl3/O2 ratio, potential additives), plasma physical parameters (pressure, power, bias) and sequences (plasma cycles) will be investigated; the etch and selectivity mechanisms will be studied using ellipsometry, AFM, Raman and photoluminescence spectroscopy.‚Äč

Type of project: Combination of internship and thesis

Duration: 6-9 months

Required degree: Master of Engineering Technology, Master of Science, Master of Engineering Science

Required background: Chemistry/Chemical Engineering, Materials Engineering, Physics

Supervising scientist(s): For further information or for application, please contact: Jean-Francois de Marneffe (Jean-Francois.deMarneffe@imec.be)

Imec allowance will be provided for students studying at a non-Belgian university.

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