Scanning probe microscopy (SPM) has become an important asset to measure a wide variety of physical properties (e.g. mechanical, electrical, magnetic) of nanoelectronics devices at the nanometer scale. A micrometer-sized tip sensor is a crucial part for an SPM system. Imec pioneered the development of dedicated tip sensors consisting of sharp diamond tips integrated into metallic beam structures which enable the electrical characterization of device structures with nanometer precision and resolution. Recently, we developed a promising new SPM approach which requires different kind of tip sensors. Therefore, this internship/master thesis is focused on the fabrication and evaluation of novel micrometer-scale tip sensors.
For this, the student will design the required lithography masks, perform diamond growth by chemical vapor deposition (CVD), carry out the fabrication steps for tips and probes, and assess the performance of the fabricated probes by SPM.
For this topic, the student will work inside a cleanroom and lab environment to carry out the required experimental steps. He/She will characterize the fabricated tip sensors using SPM. The student will be part of imec’s materials and component and analysis group.
Type of project: Internship, Thesis, Combination of internship and thesis
Duration: 6 months
Required degree: Master of Engineering Technology, Master of Science, Master of Engineering Science
Required background: Electromechanical engineering, Electrotechnics/Electrical Engineering, Materials Engineering, Mechanical Engineering, Nanoscience & Nanotechnology, Physics
Supervising scientist(s): For further information or for application, please contact: Thomas Hantschel (Thomas.Hantschel@imec.be)
Imec allowance will be provided.