Pressure sensors are widely used in multiple applications starting from automotive to medical diagnostic passing by altitude and depth measurement and flow sensing. On one hand MEMS pressure sensors (capacitive and piezo) have already a large place on the market due to their good performance and small size. On the other hand, optical fiber sensors have demonstrated their hypersensitivity and low noise performance, but for a less integrated system. The device proposed by assembles the advantages of both worlds to provide an integrated Micro-Opto-Mechanical Pressure sensor which can exhibit an increased sensitivity and noise performance compared to its piezoelectric and capacitive counterparts, for the same footprint.
Recently, Micro-Opto-Mechanical Pressure Sensors have been the focus of increasing attention from researchers. Imec developed a novel integrated Micro-Opto-Mechanical Pressure Sensor that exhibits an excellent measurement precision in a large pressure range. Our new sensor is composed of two balanced MZI, one with a sensitive spiral and one with a single loop for large range measurements. The signal of the sensitive spiral is divided into two dephased outputs to always have a sensitive measurement for each pressure. Finally, a power tap output is added for the laser intensity noise compensation.
The goal of this master thesis is to build a demo using smart algorithms to treat the information coming from the 4 outputs of the system and to demonstrate the high precision of the pressure across a large pressure range
Type of project: Thesis
Duration: 6-12 months
Required degree: Master of Engineering Technology, Master of Science, Master of Engineering Science
Required background: Computer Science, Electromechanical engineering, Electrotechnics/Electrical Engineering, Materials Engineering, Mechanical Engineering, Nanoscience & Nanotechnology, Physics