Introduction

Imec offers an integrated silicon photonics platform targeted to the telecom, datacom and medical diagnostics industries: our Silicon Photonics Platform (iSiPP). The iSiPP platform co-integrates a wide variety of passive and active components, enabling competitive photonic integrated circuits for short reach optical interconnects.

Three flavors of iSiPP

Imec's iSiPP platform is SOI-based and comes in three distinct flavors:

  • iSiPP200: 200mm (8”) full platform (see table below)
  • iSiPP50G: 200mm (8”) simplified platform/flow (see table below)
  • iSiPP300: 300mm (12”) full platform

Prototyping services

 

iSiPP50G

iSiPP200

Access model

MPW

Shared run

Dedicated run

Functionality

Basic (23 modules)

Full (30 modules)

Full (30 modules)

Silicon delivery

Dies from up to 3 wafers
(15 dies minimum)

Dies from up to 3 wafers
(20 dies minimum)

Full wafers (minimum 15)

Run timing

Fixed
(2-3 runs per year)

Semi-flexible
(max 4 customers on 1 run)

Flexible, upon request

Minimum area

5mm x 5mm

Quarter reticle (10mm x 9mm)

Full reticle (21.5mm x 18.5mm)

Metrology/test

Standard test

Standard test
+ dedicated test [optional]

Standard test
+ dedicated test [optional]

Customization

Limited (upon availability)

Options available (Semi Flexible)

Options available (Fully Flexible)

Cost sharing

Mask and processing

Mask and some processing

None

 

Key technology parameters

  • Starting substrate: Silicon-on-insulator with 220nm Si / 2000nm BOX
  • 3-level Si & 1-level poly-Si patterning with 193nm lithography
  • 6-level silicon doping & 2-level Ge doping
  • Ge-on-Si RPCVD epitaxy
  • 2-level Cu interconnects + Al bondpad
  • Deep-Si etch for edge coupling

Available devices

  • Traveling–wave Mach-Zehnder p-n modulator
  • Ge(Si) electro-absorption modulator
  • Micro-ring p-n modulator
  • Waveguide-based Ge-on-Si detectors
  • Fiber coupling:
    • Vertical “raised” grating
    • C-band edge coupler
  • Passive waveguide-based devices such as filters
  • Integrated heaters

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