2024 Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium

imec

• Pieter Gijsenbergh, R&D team leader in Multiphysics Measurement & Demonstration is presenting on Innovative electro-structural integration approach defining large-area PMUT on TFT backplane for ultrasound imaging systems

Ultrasound transducers have been studied for over 40 years. Presently, the newest generations of 
piezoelectric micromachined ultrasound transducers (PMUT) are monolithically integrated with CMOS
[1], enabling 3D imaging, yet making large-aperture systems prohibitively expensive. Hence, a CMOS
backplane does not offer an attractive pairing with large-area electronics, and particularly for display compatible ultrasound transducers, successful integration with a thin film transistor (TFT) backplane 
becomes paramount. While in antecedent literature the integration only adds an electrical functionality [2], this paper provides a proof-of-concept wherein the conductive path between back- and frontplane also serves as mechanical anchoring for the active MEMS layer.

• Milind Pandit, imec and pulsify medical collaborator is presenting on Developing a phased PMUT array for cardiac health monitoring

Ultrasound patches utilizing bulk piezo crystals for medical imaging have previously been developed in the size of a band-aid. However, for accurate, continuous measurements across large populations and over multiple days of operation, the ultrasound patch needs to be sufficiently large to ensure that the heart remains within the imaging frame. Conventional manufacturing techniques, whether utilizing pick and place of bulk piezo crystals or employing cMUT and pMUT processes using silicon-based fabrication techniques, are expensive and restricted to 6-inch, 8-inch, or 12-inch size wafers. This work presents a state-of-the-art pMUT array addressed using a row-column configuration manufactured through Flat-Panel-Display (FPD) technology. The FPD fabrication process is inexpensive, performed on large glass sheets (e.g., 40x50cm2), compatible with Thin-Film-Transistor (TFT) integration for PMUT control, and can easily accommodate flexible polymer substrates. The transducer demonstrates cardiac imaging capabilities and is benchmarked in terms of performance against other existing pMUT technologies.

Event Details

The 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium will take place September 22 – 26, 2024 at the Taipei Nangang Exhibition Center in Taipei, Taiwan. The conference encourages in-person attendance but also accommodates online attendees. This joint conference celebrates the 70th anniversary of the IEEE UFFC Society.

The following conferences will be involved:

» International Ultrasonics Symposium (IUS) 

» International Symposium on Applications of Ferroelectrics (ISAF): 

» International Frequency Control Symposium (IFCS)

» Piezoresponse Force Microscopy Workshop (PFM

Topics

IUS
Group 1: Medical Ultrasonics
Group 2: Sensors, NDE & Industrial Applications
Group 3: Physical Acoustics
Group 4: Microacoustics – SAW, FBAR & MEMS
Group 5: Transducers & Transducer Materials

ISAF
Group 1: Fundamentals and Theory of 
Ferroelectrics and Related Materials
Group 2: Processing of Ferroelectrics 
Crystals, Ceramics, Thick & Thin Films
Group 3: Characterization & Properties of 
Ferroelectrics
Group 4: Applications of Ferroelectrics, 
Piezoelectrics and Related Materials

IFCS
Group 1: Materials, Resonators and 
Resonator CircuitsGroup 
2: Oscillators, Synthesizers, Noise 
and Circuit Techniques
Group 3: Microwave Frequency Standards 
and Applications
Group 4: Sensors and Transducers
Group 5: Timekeeping, Time and 
Frequency Transfer, GNSS Applications
Group 6: Optical Frequency Standards 
and Applications

PFM
» Instrumental Aspects of PFM, ESM, 
SS-PFM and Related Techniques
» Nanoelectromechanics of Materials 
and PFM/ESM Theory
» Ferroelectric Tunnelling and Memristor 
Effects Characterized by PFM/ESM
» Multiferroic Phenomena on the 
Nanoscale
» Disordered Ferroelectrics and 
Mesoscopic Effects by PFM
» Ferroelectric Data Storage and 
Polarization Lithography
» Ionic Conductors, Battery Materials 
and Fuel Cells on the Nanoscale
» Ferroelectric Photovoltaics and TipEnhanced Phenomena
» Ferroelectric Semiconductors and 
Surface Phenomena
» Interface Engineering via PFM
» Biocompatible & Organic Polar 
Materials on the Nanoscale
» 1D and 2D Nanostructured Materials 
via PFM

Joint Sessions

» Al,ScN for PiezoMEMS, Resonators and Ferroelectrics
» Materials Development for Ultrasound Transducers 
» Domain Studies in Ferroelectrics
» Piezoelectric Micromachined Ultrasonic Transducers (PMUT)
» Machine Learning for Ultrasonics, Ferroelectrics and Frequency Control
» Wearable Device

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