EIPBN 2026
May 26 - 29, 2026 | Denver, Colorado, USA
The International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), affectionately known as “3-Beams,” is the premier gathering of scientists and engineers who are dedicated to electron, ion and photon lithography, imaging, and analysis; atomically precise fabrication; nanofabrication process technologies; related emerging technologies; and their applications in a broad spectrum of fields.
Imec will be participating in the international EIPBN conference. This is the 69th meeting of the EIPBN, where top researchers from academia, government laboratories, and industry from around the world meet to present and discuss recent trends and future directions in these technologies. Join us to learn more on our latest breakthroughs and how to work with imec:
PRESENTATION:
- 'In-device overlay study using high landing-energy SEM and VC during backside patterning in CFET technology.'
May 29 | 16:30 - 16:50
Sujan Kumar Sarkar, R&D Engineer