November 19 - 23, 2023 | Busan, Korea
KISM 2023 will be a fundamental ground to exchange high-quality results and ideas provided by Researchers and Engineers from a variety of universities, industries, and research institutes. This meeting will include prestigious Plenary Talks, Invited Talks, Regular Sessions (oral & poster presentations), and Exhibitions.
Plenary speaker
Talk on Patterning and metrology challenges in EUV lithography by Victor Hugo
Invited speakers
Talk on Area-Selective Deposition in Features with Nanoscale Dimensions for Semiconductor Device Manufacturing by Annelies Delabie
Talk on Evolution of Photolithography and Patterning Paradigms: Navigating into the DTCO and STCO Scaling Era by Ryoung-han Kim
Talk on Methodology for Efficient Monitoring of Semiconductor Processes in Very Low Volume Manufacturing (VLVM) by Dr. Tae Yong Lee
KISM 2023 will be a fundamental ground to exchange high-quality results and ideas provided by Researchers and Engineers from a variety of universities, industries, and research institutes. Furthermore, it also provides a conference to present the cutting-edge research outputs which would help both students and researchers with their future studies and works to be conducted. Hence, individuals actively engaging in semiconductor manufacturing technology research and development are greatly encouraged to participate in the conference and gain academic insights they have desired.
This meeting will include prestigious Plenary Talks, Invited Talks, Regular Sessions (oral & poster presentations), and Exhibitions.