Lithography Workshop 2026
June 22 - 25, 2026 | Sedona, Arizona, USA
The 2026 Workshop is the 29th in a series of meetings that span over 40 years, promoting the continuing evolution of lithography. With the support of its members, the Lithography Workshop has sponsored a unique program which is carefully designed to cover the latest lithography-related advancements to benefit all participants in their field of expertise. The speakers at the Workshop are selected by invitation and represent a broad range of disciplines and covering a wide array of different lithography approaches and requirements. The Workshop is limited to 150 participants.
Imec will be participating in the Lithography Workshop 2026. Each presentation (oral or poster) is invited, and each presenter is recognized for his/her outstanding work in their field. This is an opportunity for attendees to meet with world-renown investigators and discuss topics of mutual interest. The Workshop format is intended to provide an atmosphere for in-depth discussions of the invited presentations, both oral talks and poster papers.. Join us to learn more on our latest breakthroughs and how to work with imec:
PRESENTATION:
- 'Accuracy and Resolution in High NA EUV Metrology'
Gian Lorusso, Principal member of staff - 'Advanced Patterning : from Optical to EUV lithography'
Kurt Ronse, Program Director AP3