11 - 13 July 2023 | San Francisco, USA
Steven Scheer will have a talk on Thursday, July 13, 1:30-3:30 p.m. PDT:
Accelerating the pace of lithography and scaling innovation
The demand for ever-greater computing power that enables the analysis of exponentially growing amounts of data is pushing the semiconductor industry to innovate at an accelerated pace. Though traditional scaling is becoming ever more difficult, the industry has been moving forward with high-NA EUVL, which includes the infrastructure that support it (resists, masks, optics, metrology). However, nontraditional scaling methods (e.g., heterogeneous integration, 3D-ICs, etc.) are also a major player in advancing computing power. Development of quantum computing—and the devices that make it possible—fleshes out the future for advanced manufacturing processes. Each of these endeavors is examined.