12 - 14 July 2022 | Moscone North and South, San Francisco, USA
Steven Scheer will give a talk at the session on Ecosystem readiness for scaling and lithography at 3nm and below - July 14, between 1:30-3:30 p.m. PT
Session description: Meeting the demands for quantum computing, artificial intelligence, autonomous driving, and other high-performance applications, continues to drive device scaling—whether by traditional means, or nontraditional (3D ICs, heterogeneous integration, etc.). Furthermore, with ever higher-NA EUVL tools in development, the industry ecosystem must also be prepared with resist, mask, and metrology solutions. Likewise, the demand for quantum computing technologies is driving selection of new materials and novel device architectures. The morning and afternoon sessions will cover these topics. More information to follow.