CHALLENGES

​The reliable production of innovative nanoelectronic devices requires continuous, real-time in-line control. The metrology tools required to accurately characterise products at the relevant scales of one to hundreds of nanometres have yet to be developed. State-of-the-art spectroscopy techniques (such as Raman, infrared and photoluminescence spectroscopy) that map physical observables at the nanoscale lack sufficient resolution for a detailed characterisation of nanodevices. The EU-funded CHALLENGES project will improve both the spatial resolution and the signal-to-noise ratio of these techniques by exploiting the optical phenomenon of localised surface plasmon resonance. Plasmon-enhanced spectroscopic techniques will ensure the reliable manufacturing and performance of nanoelectronic devices. The project will demonstrate the new techniques in three areas: semiconductors, silicon photovoltaics and 2D materials.