Design of a MEMS-based plasma sensor to measure ion energy and flux

The objective of this master thesis is to design a miniature MEMS sensor capable of monitoring ion energy and ion flux during semiconductor plasma processing. The student will define the sensor requirements, study the operating principle and develop a feasible device architecture The challenge is to realize a compact MEMS implementation that can accurately characterize ions while remaining compatible with microfabrication constraints. The work will focus on key design parameters such as aperture size, grid spacing, electrode biasing, material selection, alignment and thermal compatibility. Analytical calculations and, where appropriate, limited electrostatic simulations will be used to support the design choices. The proposed device will then be translated into a preliminary layout and fabrication concept compatible with imec's microfabrication capabilities. Fabrication, packaging and full plasma validation are outside the core scope of the thesis and may be considered only as follow-up activities.

Imec offers the multidisciplinary environment needed for this design study, combining expertise in MEMS, materials, microfabrication and plasma processing. The student will interact with specialists to understand the measurement needs and fabrication constraints while keeping the project centered on a single, well-defined device concept. This project offers a unique opportunity to combine plasma physics, sensor design and MEMS engineering in a technology area that is critical to advanced semiconductor manufacturing. The main deliverable will be a documented first RFEA design, including its requirements, operating principle, key dimensions, material choices, preliminary layout, expected performance and a proposed route for future fabrication and experimental validation.