Optimization of the maintenance plan for Wet clean tools in a semiconductor R&D Fab

During this internship, you'll be working on imec wet clean tools.

You will perform maintenance activities, such as:

• Regular check and basic maintenance: changing consumables and cleaning
• Tool performance and integrity checks: monitoring tool parameters on regular basis and defining pro-active maintenance intervention to avoid unexpected system down situation
• Various general maintenance activities: pump changes, SW backups and electrical, pneumatical and mechanical interventions

The content of your thesis will consist of the following:  

• Review, optimize and document the maintenance checklist for a specified Wet clean tool together with the responsible engineers with focus on:
  • Pre-task planning
  • Spare parts/consumables preparation
  • Clear criteria to maintain parts to improve quality and repeatability 
  • Profound documentation to increase repeatability from engineer to engineer
  • After care
  • ...
• Participate in the current day to day maintenance activities together with the leading cluster engineer to build up practical experience
• Independently perform the basis HW checks on weekly basis
  • Update and improve checklists based on the learnings
• Generate new PM checklists for CM activities that occur during the stage to standardize the way of working for future re occurrences
• ...

Deliverables:

• Summarize all reviewed, optimized and newly generated maintenance checklists for One Fab Critical Manufacturing
• Pareto of all corrective maintenance activities per cluster and improvement actions to reduce lingering/ reoccurring issues

We will provide the following training: 

• General CR way of working and behavior
• Basics Wet clean process
• LAM tool specific training 
• Chemical training

Language requirements: Dutch, English 

Manager: Mark Godde

Mentor: Stijn Bex

For more information or application, please contact Mark Godde (mark.godde@imec.be)