/Super-Resolution Soft X-Ray Microscope based on Laser produced plasma

Super-Resolution Soft X-Ray Microscope based on Laser produced plasma

PhD - Brussel | Just now

Explore and advance state-of-the-art optical technologies for semiconductor and biomedical applications
In optical chip metrology and health diagnostics, conventional microscopes face increasing challenges in achieving nanometer-scale resolution, as industrial demands push for patterns with ever-smaller critical dimensions. There is also a growing need for non-destructive, sub-100 nm resolution metrology techniques suitable for wide-field imaging, particularly given the increasing structural complexity and the introduction of new materials in semiconductor and biomedical applications.
In soft X-ray imaging systems, performance is limited because conventional optics do not function effectively. To address this, we employ diffraction- and reflection-based optics to achieve the highest efficiency. This project explores soft X-ray radiation based on laser-produced plasma, innovative optical system designs, and applications that extend beyond ultraviolet, hard X-ray, and EUV technologies. The research focuses on the development of cost-effective and versatile solutions, with an emphasis on both the radiation source and optics components. The ultimate goal is to expand the range of semiconductor inspection and healthcare imaging applications.


  • Who you are:
    • Master’s degree in Photonics, Electronics, Physics, or Computer Science
      • Advantage: Plasma physics, Photonics
  • Who we are:
    • A university research group at imec-VUB in Brussels, with expertise in optical imaging systems and signal processing
  • Responsibilities:
    • Design of optical setup
    • Optical system analysis and simulation
    • Material characterization
    • Developing AI/ML algorithms
    • Literature review and preparation of journal publications


Required background: Experimental Physics, Engineering Technology, Engineering Science, Mechanical Engineering, or Optical Engineering

Type of work: 40% experiments, 40% modeling/simulation, 20% literature review and study

Supervisor: David Blinder

Daily advisor: Hyun-su Kim

The reference code for this position is 2026-168. Mention this reference code on your application form.

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