/Verification, calibration, and evaluation of thermal controlled measurement equipment

Verification, calibration, and evaluation of thermal controlled measurement equipment

Master projects/internships - Leuven | More than two weeks ago

Goal of this internship is to build a new way of working to get this temperature verification procedure done in an (semi-) automatic way.

 

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For standard IC testing, we typically need electrical input and output. 

Temperature measurements are becoming more important in modern way of parametric testing of electronic devices. This is done using a temperature-controlled wafer chuck. This thermo-controlled wafer chuck needs to meet the specified temperature accuracy. Current way of working is a yearly manual temperature calibration of the chuck. A wafer chuck is a plate on which wafers are securely mounted during wafer processing applications. 

Goal 

Goal of this internship is to build a new way of working to get this temperature verification procedure done in an (semi-) automatic way. 

Step 1: Investigate current way of wafer chuck calibration.  
  • This will be done by a service technician. 
  • You make notes current used procedure. 
  • Try ty address the weakness of current calibration methods. 
    • Accuracy, timing, ... 
Step 2: Systematically eliminate the weaknesses found in step 1 
  • Is current way of working the best possible? 
  • Can we change this WoW already? 

 

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Thermochuck (top) – Thermo Controller(bottom) – Active chiller (right) 

Step 3: Definition of new Way of Working 
  • Implement the current way of working in a software program. 

  • Built software tool (windows based) to run on a laptop. 

  • LabVIEW/C/Python/other... 

  • Communication with measurement instruments 

  • No special operator skill required. 

  • Reduction of the overall measurement uncertainty 

  • Compatible with different prober types and chuck systems (from cold to hot) 

  • Calibration hardware (sensors/laptop/...) will be provided to you 

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Result 
  • Repeatable and Reproducible Test Data (R & R) 

  • Full temperature range calibration with high accuracy (+/- 0.1 deg C) 

  • Long term measurement without temperature drift 

 

Duration: 6 months 

Type of Project: Internship 

Master's degree: Master of Engineering Science; Master of Engineering Technology 

Master program: Computer Science; Electrotechnics/Electrical Engineering 

For more information or application, please contact Marc Van Dievel (marc.vandievel@imec.be)

Only for self-supporting students. 

 

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