CMOS and beyond CMOS
Discover why imec is the premier nanoelectronics R&D center in the development of industry-relevant solutions for advanced logic & memory devices.
Connected health solutions
Explore the technologies that will power tomorrow’s wearable, implantable, ingestible and non-contact devices.
Life sciences
As a pioneer in nanoelectronics, imec brings the power of chip technology to the world of healthcare.
Sensor solutions for IoT
Imec develops innovative solutions for sensor networks, high speed networks and sensor technologies for the Internet of Things.
Artificial intelligence
Artificial intelligence is no longer the stuff of science fiction: its technologies are ready and its possibilities are real. It’s time to explore them, and imec is ready to help you.
More expertises
Discover all our expertises.
Research
Be the first to reap the benefits of imec’s research by joining one of our programs or starting an exclusive bilateral collaboration.
Development
Build on our expertise for the design, prototyping and low-volume manufacturing of your innovative nanotech components and products.
Solutions
Use one of imec’s mature technologies for groundbreaking applications across a multitude of industries such as healthcare, agriculture and Industry 4.0.
Venturing and startups
Kick-start your business.Launch or expand your tech company by drawing on the funds and knowhow of imec’s ecosystem of tailored venturing support.
/Expertise/CMOS and beyond CMOS/Advanced patterning and key process steps

Advanced patterning and key process steps

Introduction

Throughout the years, advanced tools and processes have been indispensable in the advancement of consecutive technology nodes and developing the next technology node comes with ever more complexity. 

Imec’s best-in-class infrastructure and materials facilitate our early development of front and back end-of-line processes as well as lithography patterning technologies for the 7nm node and beyond.

EUV Lithography 

Extreme Ultraviolet (EUV) lithography is one of the main drivers to extend Moore’s law towards single digit nanometer technology nodes.

Join our industrial affiliation program (IIAP) on advanced lithography and work with industry leaders to tackle the lithography challenges:

  • Explore materials and processes for next generation pattering.
  • Assess manufacturability of EUV lithography and readiness for high volume manufacturing.
  • Evaluate/compare lithographic imaging and patterning solutions for advanced logic and memory applications.

You can also work with us on a dedicated solution on a bilateral basis.

Advanced Patterning Center

ASML and imec have been partners for more than 30 years, bringing value to the global chip industry with breakthrough technology.

In 2013, imec and ASML launched the Advanced Patterning Center, combining imec’s and ASML’s complementary expertise, engineering teams and patterning infrastructure to tackle upcoming scaling challenges towards single digit nanometer dimensions. 

The Advanced Pattering Center is located at the imec campus in Leuven and counts about 100 engineers.

EUV RMQC

EUV RMQC is a joint venture of JSR and imec, leveraging the strengths of both companies for the development of photoresist solutions for the semiconductor industry to manufacture the most advanced devices. JSR provides manufacturing technology to the joint venture, while imec provides infrastructure and services for quality control on materials. 

In addition to the manufacturing of JSR brand photoresists, the joint venture offers toll-manufacturing capability to other material suppliers with confidentiality secured.

The EUV RMQC is located at the JSR campus in Leuven.

How can we help you?

Send us your request

I'm looking for