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Advanced metrology solutions

Imec's advanced metrology solutions aims to be a reliable and trustworthy partner for in-depth characterization of a wide variety of (semiconductor) structures.


Scanning spreading resistance microscopy

SSRM provides high-resolution quantitative carrier distributions in 1D, 2D & 3D semiconductor structures. As inventor of this electrical AFM-based technique, imec offers this technique as a service. 

Sample preparation

Imec can help you with a wide variety of sample preparation methods, ranging from cross-section polishing to advanced ion beam preparation. 

Materials and components analysis

Besides SSRM, the materials and components analysis group houses a wide variety of material characterization techniques. Upon specific request and depending availability, these are also made available to external customers. 

Partnership and training

Imec offers extensive tailor made training to introduce SSRM into your lab and can be your partner for applying AFM-based metrology to new devices and materials, and implementing novel characterization concepts. As material characterization experts we can also be your partner for developing or implementing new material analysis techniques and modes. 


Calibration standards and test samples

Imec's calibration standards are suited for the calibration of quantitative electrical measurements. We also offer a range of test samples allowing to evaluate the performance of your tools. 

For more information regarding advanced metrology solutions, Lennaert Wouters will be happy to help you.