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Revolutionizing material characterization to support semiconductor device fabrication

Table-top high-harmonic generation sources feeding industry-relevant characterization needs


The emergence of new materials to support semiconductor device scaling, drives new characterization needs. Table-top high harmonic generation (HHG) sources feeding advanced imaging and spectroscopy techniques complementing those found at synchrotron sites are being examined as a potential source to fill these needs.

This is the beating heart of the AttoLab, a game-changing, multifunctional characterization facility initiated by imec in collaboration with KMLabs and SPECS.

In this article, Paul van der Heide, director of materials and component analysis (MCA) and Co-AttoLab principal envisions how these characterization techniques will support 2D materials R&D.