/Imec Demonstrates 20nm Pitch Line/Space Resist Imaging with High-NA EUV Interference Lithography

Press release

Imec Demonstrates 20nm Pitch Line/Space Resist Imaging with High-NA EUV Interference Lithography

 The achievement marks a major milestone of imec and KMLabs’ AttoLab

About imec

Imec is a world-leading research and innovation hub in nanoelectronics and digital technologies. The combination of our widely acclaimed leadership in microchip technology and profound software and ICT expertise is what makes us unique. By leveraging our world-class infrastructure and local and global ecosystem of partners across a multitude of industries, we create groundbreaking innovation in application domains such as healthcare, smart cities and mobility, logistics and manufacturing, energy and education.

As a trusted partner for companies, start-ups and universities we bring together more than 4,000 brilliant minds from almost 100 nationalities. Imec is headquartered in Leuven, Belgium and has distributed R&D groups at a number of Flemish universities, in the Netherlands, Taiwan, USA, and offices in China, India and Japan. In 2019, imec's revenue (P&L) totalled 640 million euro.

Further information on imec can be found at www.imec-int.com.

Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a “stichting van openbaar nut”), imec Belgium (IMEC vzw supported by the Government of Flanders), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre and OnePlanet, supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.), imec China (IMEC Microelectronics (Shanghai) Co. Ltd.), imec India (Imec India Private Limited) and imec Florida (IMEC USA nanoelectronics design center).

About KMLabs

KMLabs (Boulder, Colorado, U.S.) is a leading manufacturer of compact, high-performance, ultrafast advanced lasers and systems for research and industrial applications, including multi-photon imaging, spectroscopy, coherent soft X-ray and EUV femtosecond-to-attosecond pulse generation and applications in imaging and spectroscopy. It is the only commercial supplier of a coherent tabletop soft X-ray laser light source. The company’s femtosecond laser systems (Ti:sapphire and also fiber laser based) offer unprecedented power, stability, and control,  opening-up new possibilities for fundamental research and industrial metrology, imaging, and materials characterization. Additional information can be found at www.kmlabs.com.

About Inpria

Inpria Corporation is the world leader in metal oxide photoresist design, development and manufacturing. Inpria’s EUV photoresists enable semiconductor manufacturers to realize the full potential of EUV lithography. Learn more at www.inpria.com.