MEMS foundry
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Design and foundry services

As a catalyst of semiconductor innovation, imec strives to lower the barrier to chip manufacturing. Companies, including start-ups, can use imec as a single point of entry to design support, chip fabrication, packaging, and qualification – in a wide range of standard and more exploratory technologies.

Custom design and specialty fabrication services at imec

Does your device require access to special process steps? You can work out the process flow on imec’s established process modules up to prototyping and small series. For high-volume manufacturing, the process developed at imec can be transferred to a foundry. 

Imec's process modules are available for CMOS post-processing, cross-module build, single step processing or as stand-alone platforms, sometimes – such as silicon photonics – with a PDK.

Types of available substrates include silicon, SOI, CMOS post-processing and glass.

Imec constantly develops different process modules and platforms. Please reach out if you have any specific requests.

Download our brochure

Process categoryKey process modulesSubstrate size and platform
Si photonicsWaveguide c-Si/actives & SiN200mm iSiPP200 130nm platform
 Ge photodectors200mm iSiPP200 130nm platform
SiN photonicsLPCVD waveguides200mm LPCVD SiN 130nm
 Actives (lasers/modulators)200mm LPCVD SiN 130nm
 PECVD waveguides300mm PECVD 65nm
PixelsUV pixel200mm CMOS 130nm
 Electron pixel200mm CMOS 130nm
 SWIR QD/Ge/InGaAS 
Nano-opticsNIL masters200- & 300mm 130nm - 65nm
 On-pixel multispectral200- & 300mm
 On-pixel waveguide300mm
 Meta-optics200mm(130nm)/
300mm (65nm)/
200&300mm NIL <50nm
M(O)EMSNanopores (<20nm)300mm - EUV
 Cavity bonding200mm - nanogap
 Silicon membranes200- & 300mm
 Piezo (Sc) AlN200mm PMUT
 Waveguides in dielectric membranes200mm photo-acoustic
3D integrationThrough-silicon vias200- & 300mm
 Layer transfer200mm
 Wafer bonding200- & 300mm
 Hybrid bonding200- & 300mm < 5µm pitch
 Heterogeneous integration200- & 300mm
Novel materialsPlatinum electrodes200- & 300mm
 Electro-optics (BTO/LNO)200mm
 Magnetic/resistive alloys300mm
GaNEpitaxy200mm GaN-IC
 Mesa200mm GaN-IC

 

Monolithic microsystems

IC-Link: gateway to ASIC manufacturing in major foundries

IC-Link, imec’s ASIC division, guides you through the process of designing and manufacturing an application-specific circuit (ASIC).

IC-Link is a TSMC value chain aggregator (VCA) and has agreements with other major foundries, ensuring easy access to IC production in any volume and in several standard to advanced technologies.

On top of manufacturing, several additional services are available: design and IP support, assembly, advanced packaging, testing, qualification and optimization.

For more info, visit the IC-Link website

Supporting expertise for dedicated applications

To tailor imec’s technology toolbox to your application, imec’s experts bring in a wealth of expert knowledge to support your prototyping project. This includes:

Want access to our design and foundry services? Click the button below to get in touch. 

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