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Research update

Imec puts complementary FET (CFET) on the logic technology roadmap

Improved process flows make sequential CFET an attractive alternative to monolithic CFET

Summary

The complementary field-effect transistor (or CFET) is an attractive device architecture for beyond 1nm logic technology nodes.

Imec explores two different integration schemes for fabricating CFET devices, i.e., monolithic and sequential.

In this article, optimized process flows for sequential CFET are proposed, including a low-temperature layer transfer process.

The results are presented at VLSI 2022.